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作为零位干涉检测方法中非常有前途的一种方法,计算全息可以用于非旋转对称的非球面的检测。以三次相位板为例,阐述了利用计算全息图检测非旋转对称的非球面的基本原理。分析并推导了三次相位传播过程引入的高阶波像差的理论公式,给出了三次相位板的检测系统的设计结果。详细讨论了计算全息图衍射级次的分离以及计算全息图的二元化,给出了振幅型的计算全息图的图样。计算全息图的刻线最小间隔是40μm,计算全息图的制作精度对检测结果的波前误差的影响仅仅为0.005λ。对检测系统作了详细的公差分析,结果表明所有调整公差对整个检测系统的影响和方根值为83.954nm。
As a very promising method for zero-position interference detection, holographic calculation can be used for non-rotationally symmetric aspheric detection. Taking the cubic phase plate as an example, the basic principle of using non-rotationally symmetric aspheric surface to calculate the hologram is described. The theoretical formula of high order wave aberration introduced in the three phase propagation process is analyzed and deduced. The design results of the detection system of three phase plates are given. The separation of diffraction orders of holograms and the binarization of holograms are discussed in detail, and the patterns of amplitude-based computed holograms are given. The minimum interval for calculating the hologram is 40μm. The effect of calculating the hologram precision on the wavefront error of the detection result is only 0.005λ. A detailed tolerance analysis of the test system was made and the results showed that the influence of all adjustment tolerances on the entire test system and the root mean square was 83.954 nm.