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为了研究多种作用因素在高加速、大行程条件下对超精密微动台静态精度的影响,利用刚体运动学,通过综合工件台中的线性位置误差与角位置误差,建立了超精密气浮工件台的静态误差解析模型。利用该模型,结合有限元等方法定量分析了超精密气浮工件台中加速度、制造误差、结构柔性及气浮轴承刚度等普遍存在的误差因素同时作用时对系统最终精度的影响。通过分析,证明在高加速、大行程条件下,气浮轴承的角刚度不足是造成静态误差的主要因素。
In order to study the influence of many factors on the static precision of the ultra-precision micro-controller under high-acceleration and long-stroke conditions, by using the rigid body kinematics and by integrating the linear position error and the angular position error in the workpiece table, Stationary error analysis model. Based on the model and finite element method, the influence of the common error factors such as acceleration, manufacturing error, structural flexibility and air bearing stiffness on the final precision of the system is quantitatively analyzed. Through analysis, it is proved that under the conditions of high acceleration and large stroke, the insufficient angular stiffness of air bearing is the main factor of static error.