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为了无需定制补偿透镜或者计算全息等就能实现对非球面光学元件的检测,提出了非零位补偿测试非球面的方法。对非零位补偿检验非球面中的部分补偿法、数字样板法和子孔径拼接法的基本原理和基础理论分别进行了分析和研究,建立了合理的数学模型,并对其具体的实现步骤和测试流程进行了分析和规划。结合工程实例,分别利用数字样板法和子孔径拼接法对一口径为350 mm的浅度非球面进行了面形检测,两种方法面形的PV值和RMS值的偏差分别为0.015λ和0.002λ(λ=632.8 nm),并设计和组建了部分补偿检验装置对一高精度凸双曲非球面反射镜进行了测量,其面形的PV值和RMS值分别为0.183λ和0.018λ。
In order to detect the aspheric optical element without the need of custom compensating lens or calculating hologram, a non-zero compensation method of testing aspheric surface is proposed. The basic principle and basic theory of the non-zero compensation partial aspheric compensation method, the digital model method and the sub-aperture splicing method are respectively analyzed and studied, and a reasonable mathematical model is established. The concrete implementation steps and tests The process was analyzed and planned. Combined with the engineering examples, the surface of a shallow aspheric surface with a diameter of 350 mm was detected by digital sample method and subaperture splicing method. The deviations of PV and RMS values of the two methods were 0.015λ and 0.002λ, respectively (λ = 632.8 nm). A partially compensated testing device was designed and constructed to measure a high-precision convex aspheric reflector. The surface PVs and RMS values were 0.183λ and 0.018λ, respectively.