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通过电火花加工技术,采用含碳较高的煤油作为电介质,利用导电性能及加工性能较好的紫铜作电极材料,实现了SiO2/CH/Au复合黑腔侧表面方形诊断孔的精密加工。采用OLYMPUS STM6测量显微镜对诊断孔尺寸,结果表明:孔的尺寸加工精度可控制在±10μm内,同一电极加工的诊断孔尺寸一致性可控制在±5μm内。采用扫描电镜能谱分析SiO2/CH/Au加工导电层的成分,结果表明:电火花加工过程中,由于电介质分解生成游离态的碳以及电极材料铜熔融后沉积在CH和SiO2层表面,形成辅助导电层。通过加工辅助导电层,产生的瞬时高温使SiO2和CH层熔融气化,从而实现对绝缘层的加工。
By using EDM, kerosene with higher carbon content as the dielectric, the square hole of the surface of SiO2 / CH / Au composite black cavity was precisely machined by using copper with better electrical conductivity and better machinability as the electrode material. Using OLYMPUS STM6 measurement microscope to diagnose the size of the hole, the results show that: the hole size machining accuracy can be controlled within ± 10μm, the same electrode processing diagnostic hole size uniformity can be controlled within ± 5μm. The composition of the conductive layer was analyzed by scanning electron microscopy (SEM). The results showed that during the EDM process, the free carbon formed by dielectric decomposition and the electrode material Cu melted and deposited on the surface of CH and SiO2 layer to form the auxiliary conductive Floor. By processing the auxiliary conductive layer, the instantaneous high temperature generated causes the SiO2 and CH layers to melt and vaporize, thereby processing the insulating layer.