阐述了金刚石薄膜中成分、结构、夹杂尤其是化学与结构缺陷对热、电、光学、机械、化学性质的影响.介绍了薄膜品质检测、表征方法的新进展.表明品质表征有向点缺陷类别及其浓度分布、掺杂和偏折方向深入的趋势．为了控制品质、增强薄膜特性、开发新的器件，必须探求更完善的分析方法建议在SEM－WDCL（阴极荧光扫描电子显微分析装置）上，在确保‘CL’（阴极荧光）最高收集效率条件下，力求不降低原有SEM的空间分辨率；在‘CL’谱对杂质有很高灵敏度基础上完善定量分析能力，结合数字图象分析，取得了膜中缺陷、掺杂、偏析乃至非金刚石碳的分布统计 The effects of composition, structure, inclusions, especially chemical and structural defects on the thermal, electrical, optical, mechanical and chemical properties of diamond films are described.The new progress on the methods of film quality testing and characterization is introduced.The quality characterization of point defects And its concentration distribution, doping and deflection depth direction. In order to control the quality, enhance the characteristics of the film, and to develop new devices, more sophisticated analytical methods must be explored. On the SEM-WDCL (Cathode Fluorescence Scanning Electron Microscopy Analyzer), the highest CL ’(cathode fluorescent) , Do not reduce the spatial resolution of the original SEM; in the ’CL’ spectrum on the basis of a very high sensitivity to impurities to improve the quantitative analysis capabilities, combined with digital image analysis, obtained in the film defects, doping, segregation and even non-diamond Carbon distribution statistics