论文部分内容阅读
设计制作了一种非硅基底的 1× 2微机械光开关 ,利用电磁驱动微反射镜运动实现输出端口切换 ,开关时间 <3ms ,封装尺寸缩小至 2 1mm× 16mm× 12 .6mm ,驱动电压 5VDC ,经 5× 10 6 次开关重复性测试 ,性能稳定
A non-silicon substrate 1 × 2 micromechanical optical switch is designed and manufactured. The output port is switched by using the electromagnetic driven micro-mirror movement. The switching time is less than 3ms, the package size is reduced to 2 1mm × 16mm × 12.6mm and the driving voltage is 5VDC , After 5 × 10 6 times switch repeatability test, stable performance