论文部分内容阅读
采用自制 2 4 50MHz ,5kW不锈钢谐振腔型微波等离子体设备 ,研究了超声处理、细砂纸研磨、1 μm和 0 .5μm金刚石粉研磨等Si3N4基底预处理方法对MPCVD金刚石涂层质量的影响 ,用SEM和Raman光谱仪检测和分析了金刚石成核和生长质量 ,分析了金刚石的应力情况 ,用对比切削实验检测了金刚石涂层的附着情况。结果表明 ,经 0 .5μm金刚石粉研磨后 ,在 7.0kPa压力、1 .5%的CH4/H2 气体流量比、1 .5kW微波功率下 ,沉积4h可得到高质量的金刚石涂层 ,在切削 1 8.0 %Si Al合金时 ,金刚石涂层Si3N4刀具比未涂层Si3N4刀具的加工光洁度提高一级 ,使用寿命提高 1 0倍以上。
The effect of Si3N4 substrate pretreatment methods such as ultrasonic treatment, fine sandpaper grinding, 1μm and 0.5μm diamond powder grinding on the quality of MPCVD diamond coating was studied by using self-made microwave plasma equipment of 2 4 50MHz and 5kW stainless steel. The nucleation and growth quality of diamond were detected and analyzed by SEM and Raman spectrometer. The stress of diamond was analyzed. The adhesion of diamond coating was tested by contrasting cutting experiment. The results show that after milling with 0.5μm diamond powder, a high quality diamond coating can be obtained after being ground for 4h under 7.0kPa pressure, 1.5% CH4 / H2 gas flow ratio and 1.5kW microwave power, 8.0% Si Al alloy, the diamond coating Si3N4 tool than the uncoated Si3N4 tool processing finish improved by one, the service life increased by 10 times or more.