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在基于脉冲计数的外差干涉信号处理中,提出了一种零相位差跳变补偿的大小数相位结合处理方法,可实现外差干涉信号处理中大小数的准确结合。大数测量采用对两路干涉信号进行脉冲计数同步对减的方法实现,小数测量采用混频降频方法来提高测量分辨率,并采用锁相环对拍频信号跟踪产生用于混频降频的动态基准信号,解决外差信号拍频变化的问题,以提高小数测量分辨率的稳定性。基于信号发生器对实现的外差干涉信号处理方法进行了验证,包括测量精度、大数计数、小数相位测量。构建了双通外差干涉位移测量光路,通过对精密导轨位移的测量来验证大小数结合处理方法的有效性和信号处理方法在外差干涉位移测量应用中的可行性。
In the process of heterodyning interferometric signal processing based on pulse counting, a method of combining phase-to-small-phase and phase-shift compensation is proposed, which can realize the accurate combination of large and small numbers in heterodyning interference signal processing. Large number of measurements using two-way interference pulse counting synchronization method to reduce the decimal measurement using frequency mixing method to improve the measurement resolution, and the use of phase-locked loop beat-frequency signal generated for the mixing frequency Of the dynamic reference signal to solve the heterodyne signal beat frequency changes in order to improve the stability of fractional measurement resolution. Based on the signal generator, the method of heterodyning interference signal processing is verified, including measurement accuracy, counting of large numbers, and measurement of fractional phase. The dual-path heterodyne interference displacement measurement optical path is constructed. The accuracy of the combination of large and small numbers is verified by the measurement of the displacement of the precision guideway. The feasibility of the signal processing method in the application of heterodyne interference displacement measurement is verified.