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本文对应用高气压和低气压等离子体沉积法制造光波导作了评述。首先概略地讨论了光波导的工作原理、类型及其制造要求,接着叙述了光纤制造的各种方法。详细阐明和比较了等离子体外沉积(POD)、等子体增强化学汽相沉积(PMCVD)和低气压等离子体活化化学汽相沉积(PCVD)方法。
This paper reviews the fabrication of optical waveguides using high pressure and low pressure plasma deposition. First of all, the working principle, types and manufacturing requirements of optical waveguides are discussed briefly. Then, various methods for manufacturing optical fibers are described. The POD, PEMVD and PCVD methods are described and compared in detail.