微电子技术是在半导体芯片上采用微米或亚微米级加工工艺制造微小型电子元器件和微型化电路的新兴技术。这一技术是现代高科技腾飞的翅膀,是现代信息技术的基石,是世界新技术革命的先导。60年代以来,微电子技术的发展突飞猛进。宇宙航行、电子对抗和各种功能的电子计算机的发展,对半导体器件和电路的制造工艺提出了更高要求,如小尺寸和高集成度等,原有的生产工艺限制了半导体器件和电路性能的进一步 Microelectronics is an emerging technology for manufacturing micro-electronic components and miniaturized circuits using micro- or sub-micron processing on semiconductor chips. This technology is the wings of modern high-tech takeoff, the cornerstone of modern information technology, and the forerunner of the world’s new technological revolution. Since the 1960s, the development of microelectronic technology by leaps and bounds. Astronautics, electronic warfare and the development of electronic computers of various functions have put forward higher requirements on the manufacturing processes of semiconductor devices and circuits, such as small size and high integration, the original production process limits the performance of semiconductor devices and circuits Further