采用直流电弧等离子体蒸发冷凝法制备出了粒径可控的高纯氮化钛（ＴｉＮ）纳米粉末。探讨了等离子体条件下氮化反应过程和影响ＴｉＮ粉末粒度的关键工艺参数。研究表明，高温氮等离子体条件下存在着大量的高活性基团，它们参与了氮化反应，提高了氮化反应活性。反应气体Ｎ２的压力和粉末的冷却温度是影响ＴｉＮ纳米粉末粒度的关键工艺参数。通过控制这些参数可以制备出纯度大于９８％（以质量计，下同），粒度可在８～８０ｎｍ范围内变化的ＴｉＮ纳米粉末 High purity titanium nitride (TiN) nanopowders with controlled particle size were prepared by DC arc plasma evaporation and condensation. The nitriding process under plasma condition and the key process parameters affecting the particle size of TiN powder were discussed. The results show that there are a lot of high activity groups under the high temperature nitrogen plasma conditions, which are involved in the nitridation reaction and improve the nitriding reactivity. The pressure of the reaction gas N2 and the cooling temperature of the powder are the key process parameters that affect the particle size of the TiN nano powder. By controlling these parameters can be prepared more than 98% purity (by mass, the same below), the particle size can vary in the range of 8 ~ 80nm TiN nano-powder