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一、引言 自从人们以电子作为光源,并利用电磁透镜使之会聚成像之后,近年来兴起了一门新的科学——电子光学。于是电子显微镜以崭新的面貌出现,为人类向微观世界和高技术领域的进展提供了强有力的武器。各种电镜(透射电镜、扫描电镜、俄歇电镜、扫描隧道电镜),电子探针,各种表面分析仪以及电子束曝光机,电子束退火装置等的研究,制造和开发利用非常活跃,业已深入到微电子技术的各个领域,对微电子技术的发展起着巨大的作用。
I. INTRODUCTION Since people used electronics as a light source and used electromagnetic lenses to converge and image, a new science-electronic optics has emerged in recent years. As a result, electron microscopy appears in a completely new look and provides a powerful weapon for the advancement of mankind to the micro-world and high-tech fields. Various types of electron microscope (TEM, SEM, Auger electron microscopy, scanning tunneling electron microscopy), electronic probes, a variety of surface analyzers and electron beam lithography, electron beam annealing device research, manufacturing and development is very active, has been Deep into the various fields of microelectronics technology, the development of microelectronics plays a huge role.