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本文详细分析了激光平面度检测仪的误差来源, 从理论和实践两方充分论证了该仪器检测数据的可靠性, 并指出了仪器进一步改进的方向, 为该类仪器的设计和精度分析提供了范例。
This paper analyzes in detail the source of laser flatness detector error from both theory and practice to fully demonstrate the reliability of the instrument test data and pointed out the direction of further improvement of the instrument for the design and accuracy of such instruments provided example.