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A method for automatic verification of cache coherence protocols is presented, in which cache coherence protocols are modeled as concurrent value-passing processes, and control and data consistency requirement are described as formulas in first-orderμ-calculus. A model checker is employed to check if the protocol under investigation satisfies the required properties. Using this method a data consistency error has been revealed in a well-known cache coherence protocol.The error has been corrected, and the revised protocol has been shown free from data consistency error for any data domain size, by appealing to data independence technique.