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研究了用等离子体增强化学气相沉积方法（PECV），经过后处理制备出SINxOy薄膜，测量了其光致发光（PL谱）特性，观测到强度大约为多孔硅蓝光发射10倍的蓝光（440nm）和紫外光（360nm）的发射。此外，测量了其X射线衍射谱，对其成分和结构做了一定的分析和研究。
The PECV was used to fabricate the SINxOy film. The photoluminescence (PL) characteristics of the film were measured. The intensity of blue light (440 nm) was about 10 times higher than that of porous silicon blue light. And ultraviolet (360 nm) emission. In addition, the X-ray diffraction spectrum was measured and its composition and structure were analyzed and studied.