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利用有限元法对圆锥形场致发射阴极的真空微三极管进行了计算机模拟。改变真空微三极管的各项结构参数及阳极和栅极电压 ,得到一系列模拟数据。然后对模拟结果进行分析讨论 ,总结出圆锥形阴极有效发射、阳极电流与真空微三极管的结构尺寸、阳极电压和栅极电压之间的关系 ,对于真空微三极管的实际设计和制作有一定的参考价值
The vacuum microtransistor of conical field emission cathode was simulated by finite element method. Change the structure parameters of the vacuum micro-transistor and anode and gate voltage, get a series of simulation data. Then, the simulation results are analyzed and discussed, and the relationship between the effective emission of the conical cathode, the anode current, the structure size of the vacuum microtransistor, the anode voltage and the gate voltage is summarized, and there is some reference to the actual design and fabrication of the vacuum microtransistor value