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合成三氯甲硅烷中常含有多氯硅烷类和甲基氯硅烷类物质。目前对它们的研究仅限于理论方面,而实验研究较少。本文采用气相色谱质谱联用技术对合成的三氯甲硅烷中含有的多氯硅烷进行了解析,确认主要成分是六氯乙硅烷,其次是六氯乙硅氧烷和五氯乙硅烷;通过间接测试的方法实现了甲基氯硅烷与三氯甲硅烷、四氯化硅在HP-5ms色谱柱上的完全分离,并确认甲基氯硅烷类主要是甲基二氯硅烷、二甲基氯硅烷、甲基三氯硅烷。
Trichlorosilane synthesis often contains polychlorinated silanes and methylchlorosilanes. At present, their research is limited to theoretical aspects, and experimental research is less. In this paper, GC-MS was used to analyze the polychlorosilane contained in the synthesized trichlorosilane. The main components were hexachlorodisilane, followed by hexachlorodisiloxane and pentachlorodisilane; The test method has realized the complete separation of methylchlorosilane, trichlorosilane and silicon tetrachloride on HP-5ms column, and confirmed that methylchlorosilanes are mainly methyl dichlorosilane, dimethylchlorosilane , Methyl trichlorosilane.