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利用多光束干涉有可能测量到光学平面的微小平面度偏差。本文叙述了一种利用法布里—珀罗干涉仪和楔形干涉仪相串联使之产生白光多波长干涉条纹细分的方法。它使普通斐索干涉条纹间隔对应的λ/2光程差作N倍细分,而使条纹间隔对应的程差变为λ/2N,从而极大地提高了测量灵敏度。实际测试表明,利用本方法能容易地判别出小于λ/500的平面度偏差,或许这在国内是一个比较好的测量结果。
Using multi-beam interference it is possible to measure small flatness deviations to the optical plane. This paper describes a method using the Fabry-Perot interferometer and the wedge interferometer in series to produce white light multiwavelength interference fringe subdivision. It subdivides the λ / 2 optical path difference corresponding to the normal Fizeau interference fringe interval by N times, and the difference between the fringe intervals becomes λ / 2N, which greatly improves the measurement sensitivity. Practical tests show that this method can easily determine the flatness deviation less than λ / 500, which is probably a good measurement in China.