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The etching process of the high aspect ratio of silicon deep trench is the key technology in MEMS field.Having used Oxfo......
提出了一种基于新型微电极且沉积过程可自动控制的局域电化学沉积技术, 实现了高纵横比的铜微结构的制备。将新型微电极作为阳极固......
Hovering ability forms the basis for space operations of Micro Aerial Vehicles(MAVs).The problem of uneven load puts hig......
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