Chemical Solution Deposition Planarization Derived Flexible Substrates for High Performance Coated C

来源 :The 5th International Congress on Ceramics, ICC5(第五届国际陶瓷大会) | 被引量 : 0次 | 上传用户：beehxf

【摘要】

：

　　Ion-Beam Assisted Deposition magnesium oxide(IBAD-MgO)is fabricated for high temperature superconductor(HTS)coated conductors and needed smooth surface of s

【作者】

：

PanZhang;JieXiong;YangKe;YanXue;FeiZhang;XiaohuiZhao;BowanTao;

【机构】

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State Key Laboratory of Electronic Thin Film and Integrated Devices,University of Electronic Science

【出处】

：

The 5th International Congress on Ceramics, ICC5(第五届国际陶瓷大会)

【发表日期】

：

2014年期

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　　Ion-Beam Assisted Deposition magnesium oxide(IBAD-MgO)is fabricated for high temperature superconductor(HTS)coated conductors and needed smooth surface of substrates as the root mean square(RMS)roughness less than 1nm.Compared with the traditional electrochemical polishing techniques,chemical solution deposition planarization(SDP)method is more economy and environmentally friendly,also yields a barrier layer for preventing the interdiffusion.

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Chemical Solution Deposition Planarization Derived Flexible Substrates for High Performance Coated C

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