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主要研究了碱性抛光液各组分体积分数对其有效存储时间的影响。实验中每隔两个月测试了抛光液的pH值、平均粒径和Cu膜去除速率等参数随存储时间的变化值。研究表明:FA/O螯合剂体积分数是影响抛光液有效存储时间的主要因素,螯合剂体积分数越高抛光液的有效存储时间越短。在FA/O螯合剂体积分数较低时(8%),Cu布线碱性抛光液的有效存储时间在半年以上,基本能够符合产业化要求。SiO2磨料体积分数和非离子型表面活性剂体积分数是影响碱性抛光液有效存储时间的次要因素,对其有效存储时间影响不明显。
The main study of the alkaline polishing solution volume fraction of its effective storage time. In the experiment every two months, the pH value of the polishing solution, the average particle size and the Cu film removal rate and other parameters with the storage time changes. The results show that the volume fraction of FA / O chelating agent is the main factor affecting the effective storage time of the polishing solution. The higher the volume fraction of the chelating agent, the shorter the effective storage time of the polishing solution. When the volume fraction of FA / O chelating agent is low (8%), the effective storage time of Cu alkaline polishing slurry is more than six months, basically meeting the requirements of industrialization. SiO2 abrasive volume fraction and non-ionic surfactant volume fraction are the secondary factors that affect the effective storage time of alkaline polishing solution, and have no obvious effect on the effective storage time.