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采用静电探针方法测量了ＭＥＶＶＡ（金属蒸汽真空弧）离子源中的等离子体。得到了单探针、双探针的特性曲线，等离子体电子温度和等离子体离子密度以及离子密度随离子源轴向的变化和径向分布，其中离子密度随离子源径向的分布近似为高斯分布。还研究了等离子体密度与弧流的关系，并采用加会切磁场的方法试图改善等离子体密度的径向分布的均匀性，得到了一些有益的结果。
The plasma in the MEVVA (metal vapor vacuum arc) ion source was measured using the electrostatic probe method. The characteristic curve of single probe and double probe, the plasma electron temperature, plasma ion density and ion density change with the axial direction and radial distribution of the ion source are obtained. The ion density distribution along the radial direction of the ion source is approximately Gaussian distributed. The relationship between the plasma density and the arc current was also studied. By using the method of adding a magnetic field to improve the uniformity of the radial distribution of the plasma density, some beneficial results were obtained.