论文部分内容阅读
激光干涉测长中的长度计算公式一般多数采用L=(λ_(He-Ne)/8)·N进行计算的。式中L为被测长度,λ_(He-Ne)为He—Ne激光波长,N为激光干涉条纹变化次数。从这个公式可以看出,要取得准确的长度测量,首先必须要取得其准确的波长数,可以说λ_(He-Ne)取得越准确,L也就能达到越准确。人们传统处理问题的方法,一般是通过各种传感器对外界环境参数测试后用n(T、P、F、K)(即典型的Edlin)公式进行计算取得的。但必须指出,T、P、F、K的取得是有误差的,这个误差表现在环境参数的变化和传感器的实时准确测量与否,其二,n(T、P、F、K)公式也是近似计算的经验公式。可以想象想取得λ_(He-Ne)(空气波长)越准确,所花的代价也就越大。这对一般用户使用带来很大的不便。长期实践也证明了这一点。
The length of the laser interferometer length calculation formula most of the general use of L = (λ_ (He-Ne) / 8) · N calculations. Where L is the measured length, λ_ (He_Ne) is the He-Ne laser wavelength, and N is the number of laser interference fringe changes. From this formula, we can see that to obtain the accurate length measurement, we must first get the accurate wavelength. It can be said that the more precise λ_ (He-Ne) gets, the more accurate L can achieve. The traditional methods for dealing with the problem are usually obtained by measuring the environmental parameters of various sensors with n (T, P, F, K) (that is, the typical Edlin formula). However, it must be pointed out that the acquisition of T, P, F and K is inaccurate. This error is reflected in the change of environmental parameters and the accurate measurement of the sensor in real time. Second, the formula of n (T, P, F, K) Approximate calculation of empirical formula. It is conceivable that the more accurate the He-Ne (air wavelength) is, the greater the cost. This is a big inconvenience to the average user. Long-term practice also proved this point.