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研制出紧凑型树状分支结构马赫-曾德尔干涉(MZI)型有机聚合物1×2热光开关以及1×32集成波导热光开关阵列。利用旋转涂覆法、紫外固化工艺、接触曝光、反应离子刻蚀(RIE)、真空镀膜、切割和抛光等传统微加工工艺,成功完成了器件制备。通过优化刻蚀工艺,有效减小了刻蚀后波导的表面与侧壁粗糙度。通过在波导和金属掩膜层之间添加聚合物隔离层,进一步减小了波导的传输损耗。实验结果显示,制备的1×2热光开关插损仅为2.84dB,串扰为-31.13dB,光开关的电功耗为4.1mW;制备的1×32波导热光开关阵列插损为11.8dB,串扰为-25.3dB,电功耗小于5 mW,器件开关时间为1.15ms。测试结果与数值模拟结果吻合很好,研制的光开关有望应用于光交换器(OXC)、光分插复用器(OADM)以及光控相控阵天线的波束扫描控制系统中。
A compact tree branching Mach-Zehnder interference (MZI) organic polymer 1 × 2 thermo-optic switch and a 1 × 32 integrated waveguide thermo-optic switch array were developed. The device fabrication has been successfully completed by conventional micromachining techniques such as spin coating, UV curing, contact exposure, reactive ion etching (RIE), vacuum coating, dicing and polishing. By optimizing the etching process, the surface and sidewall roughness of the etched waveguide are effectively reduced. By adding a polymer isolation layer between the waveguide and the metal mask layer, the transmission loss of the waveguide is further reduced. The experimental results show that the insertion loss of the prepared 1 × 2 thermo-optic switch is only 2.84dB, the crosstalk is -31.13dB and the power consumption of the optical switch is 4.1mW. The insertion loss of the prepared 1 × 32 waveguide thermal optical switch array is 11.8dB , Crosstalk is -25.3dB, electrical power consumption is less than 5 mW, the device switching time is 1.15ms. The test results are in good agreement with the numerical simulation results. The developed optical switch is expected to be applied to the beam scanning control system of optical switch (OXC), optical add / drop multiplexer (OADM) and light control phased array antenna.