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实验证实，由滚珠丝秆和气浮导轨构成的超精密车床伺服进给在极小的输入力矩作用下所产生的微量位移特性呈非线性和迟滞本文就这一微动特性进行了频域分析，并建立了描述这一微动特性的数学模型．通过辨识确定了系统的参数，仿真和实验结果对比验证了模型的正确性．进而利用微动特性对精密定位进行了实验研究，结果表明，微动特性可以用来实现纳米级的定位且有较好的重复性精度．关键词##4金刚石车床;;滚珠丝杠;;微动特性;;位置伺服机构
Experiments show that the micro-displacement characteristics of the ultra-precision lathe servo feed formed by ball-straw and air-float guide rail are non-linear and hysteresis under the action of minimal input torque. In this paper, the fretting characteristics are analyzed in frequency domain, And established a mathematical model to describe the fretting characteristics. Through identification, the parameters of the system are confirmed. The simulation and experimental results verify the correctness of the model. And then the micro-motion characteristics of the precision positioning of the experimental study showed that the fretting characteristics can be used to achieve nano-positioning and better repeatability. Keywords ## 4 diamond lathe ;; ball screw; fretting characteristics ;; position servo