通过磁控溅射方法在不同基片温度下制备了B4C薄膜 ,利用傅立叶红外光谱、X射线衍射、透射电子显微镜表征了薄膜的微结构 ,并采用纳牛力学探针测量了薄膜的力学性能。结果表明 ,室温下制备的B4C薄膜具有很高的硬度 ( 4 2 5GPa)和杨氏模量 ( 3 0 0GPa) ,薄膜呈现非晶或纳米晶特征。随基片温度的提高 ,薄膜略有晶化 ,硬度与杨氏模量相应增加到5 0 4GPa和 4 2 0GPa。 B4C thin films were prepared by magnetron sputtering at different substrate temperatures. The microstructures of the films were characterized by Fourier transform infrared spectroscopy, X-ray diffraction and transmission electron microscopy. The mechanical properties of the films were measured by using Naurian probe. The results show that the B4C thin films prepared at room temperature have very high hardness (425GPa) and Young’s modulus (300GPa). The films exhibit amorphous or nanocrystalline characteristics. With the increase of the substrate temperature, the film slightly crystallizes and the hardness and Young’s modulus increase to 504GPa and 420GPa, respectively.