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对有机玻璃表面透明导电膜的结构、制备工艺和特性进行了研究,通过金属氧化物复合薄膜的膜系结构设计,采用磁控溅射镀膜方法和最佳工艺参数的控制,完成了有机玻璃镀膜样片的制备。通过镀膜样片特性检测,结果表明:沉积时间60 s、厚度5 nm的情况为最佳金膜沉积参数;镀膜试验样片方块电阻为8Ω/□,可见光波段的平均透过率达到70%,具有较好的电导、光学和环境适应综合特性指标。
The structure, preparation process and characteristics of the transparent conductive film on the surface of plexiglass were studied. The film structure design of the metal oxide composite film, the magnetron sputtering coating method and the control of the optimum process parameters were adopted to complete the organic glass coating Sample preparation. The results show that the deposition time of 60 s and the thickness of 5 nm are the best gold film deposition parameters. The sheet resistance of the coated film is 8Ω / □, and the average transmittance in the visible light band reaches 70% Good conductivity, optical and environmental characteristics to adapt to the comprehensive index.