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利用纳米压痕仪和原子力显微镜对单晶锗(100)晶面进行纳米压痕试验。通过载荷-压深曲线和弹性回复率的变化情况对材料的变形机理以及硬度和弹性模量进行研究。结果表明:单晶锗(100)晶面在不同的压入深度下分别经历了弹性变形、塑性变形和脆性断裂;载荷-压深曲线中出现明显的突进和突退现象,该现象与材料的内部结构发生相变密切相关;单晶锗(100)晶面存在明显的压痕尺寸效应。该材料弹性模量的变化趋势与硬度相一致。
Nanoindentation test of single crystal germanium (100) crystal plane by nano indenter and atomic force microscope. The deformation mechanism, hardness and elastic modulus of the material were studied by the change of load-pressure curve and elastic recovery rate. The results show that the single crystal germanium (100) crystal surface undergoes elastic deformation, plastic deformation and brittle fracture at different depths of indentation, respectively. The phenomenon of sudden protrusion and retraction occurs in the curve of load-pressure depth. The internal structure of the phase transition is closely related to; single crystal germanium (100) crystal face indentation size effect. The trend of elastic modulus of the material is consistent with the hardness.