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提出了一种基于法布里珀罗板和正弦相位调制干涉术的角位移测量新方法。采用CCD探测法布里珀罗板两透射光束光斑的中心距 ,通过运算得到了入射光的初始角 ,解决了采用法布里珀罗板干涉法测量角位移需确定入射光初始角的问题。采用正弦相位调制干涉术通过测干涉信号的相位来测量物体的角位移 ,增强了对杂散光的抗干扰能力 ,减少测量误差 ,提高了测量精度。理论模拟和实验结果表明本方法可以实现精度为 10 -8rad数量级的高精度角位移测量。
A new method of angular displacement measurement based on Fabry-Perot plate and sine phase modulation interferometry is proposed. Using CCD to detect the center distance of the two transmitted beam spots of the Fabry-Perot plate, the initial angle of the incident light is obtained by calculation, which solves the problem of determining the initial angle of the incident light by the Fabry-Perot interference measurement. Sine phase modulation interferometry is used to measure the angular displacement of the object by measuring the phase of the interference signal, which enhances the anti-interference capability against stray light, reduces the measurement error and improves the measurement accuracy. Theoretical simulation and experimental results show that this method can achieve high-precision angular displacement measurement with the accuracy of 10-8rad.