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标准化是当前扫描探针显微镜领域(SPM)的一项重要工作。国际标准化组织ISO自2004年起已经将SPM标准化列入其工作框架之内,并建立了相关的分委员会、技术委员会和工作小组。本文介绍了国际上当前有关SPM标准化方面努力和主要趋势:SPM术语的标准化被认为是SPM标准化工作范围内首先需要考虑的问题,其相关标准即将发表;SPM数据管理及处理的标准化则是另一项正在进行的有利于数据访问、处理和共享的重要工作。可溯源计量型原子力显微镜(AFM)的发展解决了纳米尺度的度量问题,能够通过对标准物质进行定量分析与定标实现量值的传递。当前发展能够被计量型AFM鉴定的参考物质以及标准化仪器校正过程是实现SPM标准化之前的当务之急。为了促进SPM领域ISO标准的实现,一种新的针尖特性表征结构(tip characterizer)已经被开发出来。这种tip characterizer由超晶格组装技术实现,能够描述针尖的形状并且同时进行侧向尺度的校正。本文探讨了这种新型tip characterizer的性能。这种tip characterizer不易损坏针尖,具有很好的重复性,并能帮助实验观察分析针尖形状和结构几何特性之间的关系。
Standardization is an important part of the current field of scanning probe microscopy (SPM). The International Organization for Standardization ISO has included SPM standardization within its work framework since 2004 and has established sub-committees, technical committees and working groups. This paper presents the current international efforts and major trends in SPM standardization: Standardization of SPM terminology is considered as the first issue to be considered within the scope of SPM standardization work, and its relevant standards are forthcoming; the standardization of SPM data management and processing is another An important ongoing work on data access, processing and sharing is underway. The development of traceable metrology atomic force microscopy (AFM) has solved the problem of metrology problems at the nanoscale, enabling the transmission of magnitude through quantitative analysis and calibration of standard materials. The current development of reference materials that can be identified by metrological AFM and the standardization of instrument calibration processes are among the top priorities for standardizing SPM. In order to promote ISO standards in the field of SPM, a new tip characterizer has been developed. This tip characterizer is implemented by a superlattice assembly technique that describes the shape of the tip and at the same time makes lateral scale corrections. This article explores the performance of this new tip characterizer. The tip characterizer is less damaging to the needle tip and has good repeatability and helps experimentally analyze the relationship between the tip shape and the geometry of the structure.