论文部分内容阅读
,A novel parvial silicon on insulator high voltage LDMOS with low-κ dielectric buried layer
【机 构】
：
State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Scienc
【出 处】
：
中国物理B（英文版）
【发表日期】
：
2010年7期
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