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用脉冲激光在机械瓣膜上沉积类金刚石薄膜的实验中,保持其它实验参数不变,沉积时间分别取40min和50min来沉积类金刚石薄膜。用Raman光谱仪对机械瓣膜衬底和薄膜的微观结构进行检测;用原子力显微镜对薄膜的表面形貌进行检测。结果表明:机械瓣膜和薄膜的微观结构明显不同,并且在其它实验参数不变的条件下,沉积时间从40 min增加到50min时,薄膜中sp3/sp2的比值略微升高,薄膜的密度略微增大,薄膜中石墨晶粒的数量或体积几乎不变,薄膜的表面形貌和粗糙度几乎不变。用脉冲激光沉积法在机械瓣膜上沉积出的类金刚石薄膜和机械瓣膜之间具有很好的黏附性。
In the experiment of pulsed laser deposition of diamond-like carbon film on the mechanical valve, the other experimental parameters were kept unchanged, and the deposition time was 40min and 50min to deposit the diamond-like carbon film. The Raman spectrometer was used to detect the microstructure of the mechanical valve substrate and the thin film. The surface morphology of the thin film was detected by atomic force microscopy. The results show that the microstructures of the mechanical valve and the membrane are obviously different, and the sp3 / sp2 ratio slightly increases when the deposition time increases from 40 min to 50 min under the condition of other experimental parameters. The density of the membrane slightly increases Large, thin film graphite grains in the number or volume almost unchanged, the film surface morphology and roughness almost unchanged. The pulsed laser deposition has good adhesion between the diamond-like carbon film deposited on the mechanical valve and the mechanical valve.