AES是近十年来发展起来的一种固体表面分析方法,它的基本原理是:样品表面受到电子束轰击时,轰击点附近一定深度范围的部分原子电离;部分电离原子发生俄歇过程而发射具有特征能量的俄歇电子,被能量分析器所接收。根据俄歇电子的能量值,可 AES is a solid surface analysis method developed in recent ten years. The basic principle of AES is that when the sample surface is bombarded by electron beam, a part of atoms in a certain range of depth near the bombardment point are ionized. Partially ionized atoms undergo Auger process to emit Auger electrons with characteristic energy are received by the energy analyzer. According to the Auger electron energy value can be