一、单片集成电路的优势和应用预测半导体集成电路开创了电子技术的新时代.1975年以来,GaAs单片集成电路开始振兴.它的振兴得力于几个重要因素,首先是得力于GaAs材料和器件工艺的进展,GaAs场效应晶体管的平面结构和电路多用性,以及GaAs单片电阻率可达10~8Ω.cm的半绝缘衬底特性,为单片上的有源与无源单元兼容提供了有利条件.单片集成打破了有源与无源元件的工艺界限,器件或电路均按预定计划作为整个工艺流程的某 First, the advantages and applications of monolithic integrated circuits Semiconductor integrated circuits to create a new era of electronic technology since 1975 GaAs monolithic integrated circuits began to revitalize its rejuvenation in several important factors, the first is effective in GaAs material And advances in device technology, the planar structure and circuit versatility of GaAs field-effect transistors, and the semi-insulating substrate characteristics of GaAs monolithic resistivity of 10 to 8 Ω.cm make it ideal for both active and passive cells on a single chip Provide favorable conditions. Monolithic integrated technology to break the boundaries of active and passive components, devices or circuits are scheduled to plan as a whole process of a