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X 线复印为什么变得必要起来?本文叙述了它的发展必然性与电子束复印的相互关系,为了对 X 线复印的原理进行讲解,在对掩模、X 线源,X 线抗蚀剂,掩模重合等边举实例的同时,边注重解释它们各自对应的原理。特别是考虑到想把 X 线复印与电子束的方法加以比较的读者很多,本文着重解释电子线与 X 线在束的散射文式上到底有什么不同。因现在还没有发表过更多的应用实例,所以这里只例举了林肯研究所的实验成果。
Why does X-ray copying become necessary? In this paper, the relationship between its development necessity and electron beam copying is described. In order to explain the principle of X-ray copying, in the mask, X-ray source, X-ray resist, Simultaneous coincidence example, while focusing on the principle of their respective interpretation. In particular, considering the large number of readers who want to compare X-ray photocathodery with electron beam methods, this article focuses on the differences between the electron-beam and X-ray scattering modes of a beam. Because there are no more application examples published so far, only the Lincoln Institute's experimental results are cited here.