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纳米位移传感器多集成在纳米平台的平行移动柔性机构中,通过闭环控制回路来实现纳米级的平台移动精度,本文介绍了利用具有亚纳米分辨率的三光束单频激光干涉仪校正纳米级电容式线性移动平台位移的工作,阐述了校正测试系统的布局以及线位移和角度位移的校正测试原理。通过实验成功地对移动线位移320μm的纳米平台进行了校正,实验数据表明,该平台的偏摆最大角位移为3.5″。另外,对该校正系统进行了测量不确定度分析,在覆盖因子k=2时,它的扩展不确定度为(1.8+1.23×10-2 L)nm,测试长度L的单位是μm,由此显示该系统可有效评价纳米平台的移动性能。
Nano-displacement sensor and more integrated in the parallel movement of flexible nano-platform mechanism, through the closed-loop control loop to achieve nano-platform mobile accuracy, this article describes the use of sub-nanometer resolution with three-beam single-frequency laser interferometer to correct nanometer capacitance Linear displacement of the mobile platform work, set forth the layout of the calibration test system as well as the calibration principle of line displacement and angular displacement. The experimental results show that the maximum angular displacement of this platform is 3.5 ".In addition, the uncertainty of measurement of this calibration system is analyzed. When the coverage factor k = 2, its extended uncertainty is (1.8 + 1.23 × 10-2 L) nm, and the unit of test length L is μm, which shows that the system can effectively evaluate the mobility performance of nano-platform.