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本文研制了一种用于高精度膜厚监测的真空微量天平探头：半导体致冷器件恒温探头。它具有测量精度高、对真空系统无污染及结构简单等优点，有实用价值。
In this paper, we developed a vacuum microbalance probe for high-precision film thickness monitoring: semiconductor cooling device thermostat probe. It has the advantages of high measuring accuracy, no pollution to the vacuum system and simple structure, which has practical value.