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本文概要地比较了扫描电镜和电子束曝光机二者电子光学柱的异同。介绍了把一台ＡＭＲＡＹ系列电镜的电子光柱改造成ＤＹ－５型电子束曝光机电子光学柱所做的工作。最后给出了一组试验结果。
This article briefly compares the similarities and differences between SEM and EB electron optics. The work of transforming an electron beam of an AMRAY series electron microscope into an electron optical column of a DY-5 electron beam exposure machine is introduced. Finally, a set of test results are given.