提出了一种新型法布里—珀罗(F—P)微腔结构。它采用PECVD方法制备的硅/氮氧化硅结构作为微腔中的布拉格反射器,非晶碳化硅薄膜作为中间光发射层,通过对一维方向光子的限制,使发光层荧光强度增强,谱线变窄。通过调节发光层和反射器膜厚及折射率,可以精确控制发光峰位。因此,该结构可望实现全硅基材料的强室温蓝光发射。 A new Fabry-Perot (F-P) microcavity structure is proposed. It adopts silicon / silicon oxynitride structure prepared by PECVD as Bragg reflector in microcavity and amorphous silicon carbide film as intermediate light emitting layer. By limiting the photon in one-dimensional direction, the fluorescence intensity of the light-emitting layer is enhanced, and the spectral line Narrow. By adjusting the thickness and refractive index of the light-emitting layer and the reflector, the emission peak can be precisely controlled. Therefore, this structure is expected to achieve strong room temperature blue light emission of all-silicon-based materials.