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利用多靶磁控溅射技术制备了Au/SiO2纳米颗粒分散氧化物多层复合薄膜.研究了在保持Au单层颗粒膜沉积时间一定时薄膜厚度一定、变化SiO2的沉积时间及SiO2的沉积时间一定而改变薄膜厚度时,多层薄膜在薄膜厚度方向的微观结构对吸收光谱的影响.研究结果表明具有纳米层状结构的Au/SiO2多层薄膜在560nm波长附近有明显的表面等离子共振吸收峰,吸收峰的强度随Au颗粒的浓度增加而增强,在Au颗粒浓度相同的情况下,复合薄膜光学吸收强度随薄膜厚度的增加而增强.但当金属颗粒的浓度增加到一定程度时,金属颗粒相互接触,没有观察到纳米层状结构,薄膜不显示共振吸收峰特征.用修正后的M-G(Maxwell-Garnett)理论对吸收光谱进行了模拟,得到了与实验一致的结果.
The multi-target magnetron sputtering technique was used to fabricate Au / SiO2 nanoparticle dispersion oxide multilayer composite films. The effects of certain film thickness, deposition time of SiO2 and deposition time of SiO2 The influence of the microstructure of multi-layered thin films on the absorption spectra of the multi-layered thin films was changed when the film thickness was changed.The results show that the Au / SiO2 multilayer thin films with nano-layered structure have obvious surface plasmon resonance absorption near 560nm , The intensity of the absorption peak increases with the concentration of the Au particles, and the optical absorption intensity of the composite film increases with the increase of the thickness of the Au film under the same concentration of the Au particles. However, when the concentration of the metal particles increases to some extent, The nanoshelf structure was not observed and the film did not show the characteristic of resonance absorption peak.The absorption spectra were simulated by the modified Maxwell-Garnett theory, and the experimental results were consistent with those obtained.