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封窗经常使用在望远镜和大口径平行光管等光学系统中,置于整个系统最前端,其透射波前误差将影响整个系统的成像质量。检测手段决定加工精度,当封窗口径大于目前商用平面干涉仪的最大口径Φ800mm时,则无法进行全口径检测。针对这一问题,提出了1种新型的封窗全口径透射检验方法,将待测封窗置于由球面干涉仪和大口径、长焦距的标准凹球面镜组成的光路中进行透射检验。利用该检测方法成功检测了一块口径为Φ856mm、厚度为35mm、材料为熔融石英的封窗,检测结果均方根(RMS)值为0.0191λ(λ=632.8nm),满足设计要求。实验结果验证了该检测方法对于大口径封窗透射检验的可行性。
Sealing windows are often used in optical systems such as telescopes and large-diameter collimators and are placed at the forefront of the entire system. Their transmission wavefront errors affect the imaging quality of the entire system. Detection means to determine the processing accuracy, when the sealing window diameter larger than the current commercial plane interferometer maximum diameter Φ800mm, you can not be full aperture detection. Aiming at this problem, a new type of full-aperture transmission inspection method for window-sealing is proposed. The window-sealing is placed in the optical path composed of a spherical interferometer and a standard concave spherical mirror with large aperture and long focal length for transmission inspection. With the detection method, a window sealing window with a diameter of 856mm and a thickness of 35mm and fused silica was successfully tested. The RMS value of the test result was 0.0191λ (λ = 632.8nm), which meets the design requirements. The experimental results verify the feasibility of this method for the transmission inspection of large-aperture windows.