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随着近代高新技术的发展，要求各种探测器微型化。微加工技术的进步，使得微器件制造有了可能，于是微传感器就应运而生了。微热板作为一种微型加热器在微传感器中有着极为重要的作用。它的温度分布和热特性直接影响微传感器的工作性能，为此微热板的热测试和热分析成为微传感器的研制、使用和评价所必不可少的工作。 本文件对研制中的气体传感器的微热板，用红外热成像技术进行热测试和分析，获得气体传感器微热板的微小区域的温度分布，为传感器的研制提供了可靠的依据。
With the development of modern high technology, a variety of detectors are required to be miniaturized. Micro-processing technology advances, making micro-device manufacturing possible, so the micro-sensor came into being. Micro-hot plate as a micro-heater in the micro-sensor has a very important role. Its temperature distribution and thermal characteristics directly affect the performance of micro-sensors. Therefore, the thermal testing and thermal analysis of micro-thermal plates have become indispensable for the development, use and evaluation of micro-sensors. This document on the development of the gas sensor micro-hot plate, infrared thermal imaging technology for thermal testing and analysis to obtain gas sensor micro-hot plate temperature distribution of small areas for the development of the sensor provides a reliable basis.