本研究以电浆激发化学气相沉积(PECVD)法沉积二氧化钛薄膜，利用氬气(100 sccm)输送四异丙基钛酸酯(Ti (OC3H7)4)之蒸气，以氧气(15 sc......

TiO2 thin films were prepared by DC magnetron sputtering with the oxygen flow rate higher than the threshold. The film d......