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介绍多晶硅压力传感器，由于采用二氧化硅介质膜作应变电阻之间的隔离，因而提高了传感器的工作温度。实验表明，该类传感器具有灵敏度高、精度高、温度特性好、工作温限高等特点。
Introduced polysilicon pressure sensor, due to the use of silica dielectric film between the strain resistance isolation, thus increasing the sensor’s operating temperature. Experiments show that this type of sensor has the characteristics of high sensitivity, high precision, good temperature characteristics and high working temperature.