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设计并制作了基于绝缘体上硅(SOI)材料的16通道光功率可调波分复用/解复用器(VMUX/DEMUX),其信道间隔为200 GHz。该VMUX/DEMUX器件为阵列波导光栅和电吸收型可调光衰减器的单片集成。给出了器件的基本工作原理、基本结构以及器件的结构参数值,并对器件进行了测试,且对测试结果进行了简单分析。测试结果显示,该VMUX/DEMUX器件的片上损耗为9.324~10.048 d B,串扰为6.5~8.2 d B;在20 d B衰减下,单通道最大功耗为87.98 m W;16通道中最快响应上升时间为34.5 ns,下降时间为37.0 ns,响应时间为71.5 ns,所有通道的响应时间均在100 ns以下。该器件整体尺寸为2.9 mm×1 mm,能够实现良好的波分复用/解复用及信道功率均衡的功能。
A 16-channel optical power tunable wavelength division multiplexer / demultiplexer (VMUX / DEMUX) based on silicon on insulator (SOI) material has been designed and fabricated with a channel spacing of 200 GHz. The VMUX / DEMUX device is monolithic with arrayed waveguide gratings and electro-absorption dimmable attenuators. The basic principle of the device, the basic structure and the structural parameters of the device are given. The device is tested and the test results are analyzed briefly. The test results show that the on-chip loss of this VMUX / DEMUX device is 9.324 ~ 10.048 d B and the crosstalk is 6.5 ~ 8.2 d B; the maximum power consumption of a single channel is 87.98 mW at 20 d B attenuation; the fastest response of 16 channels The rise time is 34.5 ns, the fall time is 37.0 ns, the response time is 71.5 ns, and the response time for all channels is under 100 ns. The overall size of the device is 2.9 mm × 1 mm, enabling good wavelength division multiplexing / demultiplexing and channel power equalization.