一、引言尺寸计量可归类为一坐标、二坐标或三坐标的测量。大多数量规等的标定基本上是单轴测量。表面形貌的评定多半为两轴,这样的计量包括形状、轮廓、波纹度及表面纹理的测量。即使在用三坐标机测量时,常用的也仅是三轴中的两轴。因而,两坐标的表面测量有广泛的范围,并有许多型号的表面测量仪器。这 I. INTRODUCTION Dimension measurement can be classified as a coordinate, two coordinate or three coordinate measurement. Most gauges and other calibration is basically a single axis measurement. Surface profiling is mostly two-axis, and such measurements include shape, contour, waviness, and surface texture measurements. Even when measured with a CMM, only two of the three axes are commonly used. Thus, two-coordinate surface measurement has a wide range, and many types of surface measurement instruments. This