电荷转移效率是CCD的一个核心参数,制作工艺对其有着极大的影响,因而,对于衬底的制备直至芯片制成的整个工艺过程都必须认真地加以考虑。本文针对制作器件中的一些关键工艺与转移效率的关系,进行了分析、探讨,并且根据多年的工作实践,在工艺方面采取了一定的措施,使CCD转移效率η>99.99%。 Charge transfer efficiency is a core parameter of the CCD, the production process has a great impact on it, and therefore, for the preparation of the substrate until the chip until the entire process must be carefully considered. In this paper, we analyze and discuss the relationship between some key processes and transfer efficiency in the fabrication of devices, and take some measures in the process according to years of work practice, so that the transfer efficiency of CCD is more than 99.99%.