论文部分内容阅读
A kinetic simulation model has been employed to study the properties of an electronegative magnetized plasma sheath assuming the cut-off distribution of electrons and negative ions.The fundamental kinetic Bohm condition for the electronegative magnetized plasma has paramount importance for the formation of a stationary plasma sheath near the material wall.The presence of an oblique magnetic field in an electronegative plasma affects the ion distribution at the plasma injection side and at the wall.The temperature profile of negative charged particles has a non-uniform distribution,which determines the energy flow towards the wall.