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提出了利用量子约束斯塔克(Stark)效应制作具有调制功能的多模干涉型1×3分束器的设计思想,并详细分析了这种光分束器的工作原理。根据理论计算结果,制作了具有调制功能的多模干涉型1×3分束器。分束器的脊型多模波导长度为275μm,宽度为10μm,波导层采用GaAs/AlGaAs多量子阱结构,厚度约为0.2μm;电极采用共面波导结构。首先用有限差分光束传播法模拟了器件的光波传播特性,然后进行了初步的实验验证。理论模拟和实验结果表明,波长为0.86μm的高斯光束对称入射到多模波导的中心,器件实现了3分束功能;施加3 V的直流偏压,器件的调制深度达90%以上、调制带宽为2 GHz,实现了电吸收调制功能。
The design idea of making a multimode interference 1 × 3 beamsplitter with modulation function by using the quantum confinement Stark effect is proposed. The working principle of the beam splitter is analyzed in detail. Based on the theoretical calculation results, a multimode interference 1 × 3 beamsplitter with modulation function was fabricated. The ridged multimode waveguide of the beam splitter has a length of 275 μm and a width of 10 μm. The waveguide layer has a GaAs / AlGaAs MQW structure with a thickness of about 0.2 μm. The coplanar waveguide structure is adopted as the electrode. First, the light propagation characteristics of the device were simulated by the finite difference beam propagation method, and then a preliminary experimental verification was carried out. Theoretical simulation and experimental results show that the Gaussian beam with a wavelength of 0.86 μm is symmetrically incident on the center of the multimode waveguide, and the device achieves a 3-beam splitting function. When a DC bias voltage of 3 V is applied, the modulation depth of the device reaches more than 90% For 2 GHz, to achieve the absorption modulation function.