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空气中真空紫外线清洗时砷化镓表面的氧化＝［刊．俄］∥－１９９３．２２（２）．－５０～５２本文列举了在Ｏ＿２介质（空气中）中真空紫外线清洗砷化镓过授的相关数据。采用的真空紫外线辐射源是Ｄ＿２放电灯（其电功率为５００Ｗ）．它在１１５～２００ｎｍ范围内保证...
The oxidation of gallium arsenide on the surface of vacuum ultraviolet light in air = []. Russia] ∥-1993.22 (2). -50 ~ 52 This article lists the related data of vacuum gallium arsenide over-exposure in O 2 media (air). The vacuum ultraviolet radiation source used is D_2 discharge lamp (its electric power is 500W). It guarantees in the range of 115 ~ 200nm ...